NM-EFP1A/NM-EFP3A
PSX307/PSX307A Plasma Cleaner
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Specifications
- Model ID
- PSX307
- Model No.
- NM-EFP1A
- Cleaning Method
- Parallel plate RF back-sputtering method
- Gas for Electrical Discharge *
- Ar [option - O2]
- Substrate Dimensions (mm) *
- L 50 x W 20 to L 250 x W 75 [*2] incl. S type option
- Substrate Thickness (mm)
- 0.5 to 2.0
- Dimensions (mm) / Mass *
- W 930 x D 1,100 x H 1,450 / 555 kg
- Power Source *
- 1-phase AC 200 V, 2.00 kVA [Full Load 5.00 kVA]
- Pneumatic Source
- 0.49 MPa or more, 6.5 L/min [A.N.R.]
- Model ID
- PSX307A
- Model No.
- NM-EFP3A
- Gas for Electrical Discharge
- Ar [Option - O2, O2 + He]
- Power Source
- 1-phase AC 200 / 208 / 220 / 230 / 240 ± 10 V, 50 / 60 Hz , 6.00 kVA
- Pneumatic Source
- 0.49 MPa, 50 L/min［A.N.R］
- Dimensions (mm)
- W 900 × D 1,150 × H 1,650
- Mass
- 630 kg